Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Makoto Mizuno0
Date of Patent
September 19, 2006
0Patent Application Number
107994240
Date Filed
March 11, 2004
0Patent Primary Examiner
Patent abstract
The present invention provides a drive mechanism having a high rigidity and capable of performing fine adjustment in 6-axis directions of an optical element such as a mirror or a lens, or a support member for supporting the optical element, in optical equipment such as an exposure device. The drive mechanism has such a feature that three monolithic planar 3-joint or 4-joint link mechanisms are each arranged between a movable portion and a stationary portion through the intermediation of a bearing having at least one degree of freedom of rotation.
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