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US Patent 7110628 Reconfigurable microphotonics devices via deformable membrane platforms

Patent 7110628 was granted and assigned to Massachusetts Institute of Technology on September, 2006 by the United States Patent and Trademark Office.

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Patent abstract

A microphotonic device is provided. The microphotonic device includes a membrane structure that can experience strain. A waveguide element is formed on the membrane structure so that when the membrane structure is strained, the waveguide element elements are tuned to a selective amount.

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