US Patent 7111467 Ultra-low temperature closed-loop recirculating gas chilling system
Patent 7111467 was granted and assigned to Brooks Automation on September, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 25, 2002
0
Date of Patent
September 26, 2006
0
Patent Application Number
10470123
0
Patent Inventor Names
Kevin P. Flynn
0
Mikhail Boiarski
0
Oleg Podtcherniaev
0
Paul Hall
0
Roger Lachenbruch
0
Tamirisa V. V. R. Apparao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7111467 Ultra-low temperature closed-loop recirculating gas chilling system
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
