US Patent 7112808 Wafer 2D scan mechanism
Patent 7112808 was granted and assigned to Axcelis Technologies on September, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 25, 2004
Date of Patent
September 26, 2006
Patent Application Number
10786660
Patent Inventor Names
Michael Ioannou
0
Joseph Ferrara
0
Mehran Asdigha
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7112808 Wafer 2D scan mechanism
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
