A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
US Patent 07112918 Microdischarge devices and arrays having tapered microcavitiesUS Patent 7112918 Microdischarge devices and arrays having tapered microcavities
Infobox
Patent Number
071129180
Patent Number
71129180
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