US Patent 7115169 Replaceable shielding apparatus
Patent 7115169 was granted and assigned to Tegal Corporation on October, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 7, 2003
Date of Patent
October 3, 2006
Patent Application Number
10636020
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7115169 Replaceable shielding apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
