Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shigenori Hayashi0
Kazuhiko Yamamoto0
Date of Patent
October 3, 2006
0Patent Application Number
103196540
Date Filed
December 16, 2002
0Patent Primary Examiner
Patent abstract
The present invention provides a method of depositing a metal film on a substrate in a non-oxidizing atmosphere and then forming a metal oxide film by oxidizing the metal film in an oxidizing atmosphere.
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