Patent attributes
There is provided a micromirror device, which is provided with a mirror layer including a mirror surface which is supported to be rotatable around a first axis passing through a center of the mirror surface, and an upper substrate having transparency including a first upper electrode part and a second upper electrode part arranged on its surface facing the mirror layer to face each other via a first upper boundary passing through a center of the surface and parallel to the first axis, and a lower substrate including a first lower electrode part and a second lower electrode part arranged on its surface facing the mirror layer to face each other via a first lower boundary passing through a center of the surface and parallel to the first axis. The upper substrate is stacked on one side of the mirror layer while securing a first space between the center of the mirror surface and the first and second upper electrode parts, while the lower substrate is stacked on the other side of the mirror layer while securing a second space between the center of the mirror surface and the first and second lower electrode parts. The mirror surface is rotated around the first axis by applying voltage to a pair of the electrodes placed diagonally with respect to the first axis.
