Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Guangwei Wu0
Thomas E. West0
Donald P. Dietz0
Date of Patent
October 10, 2006
0Patent Application Number
103970690
Date Filed
March 24, 2003
0Patent Primary Examiner
Patent abstract
Pads and methods of making the pads for applications such as polishing substrates and chemical mechanical planarization of substrates are provided. The pads include a substantially smooth surface for improved performance.
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