Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kyle M. Hanson0
Daniel J. Woodruff0
Date of Patent
October 10, 2006
0Patent Application Number
101544260
Date Filed
May 21, 2002
0Patent Primary Examiner
Patent abstract
A reactor for electroplating a workpiece includes a vessel having a ring contact arranged to support a workpiece in a horizontal orientation. In an embodiment of the invention, an electrode is arranged below the ring contact, and a pressing member is arranged above the ring contact to press a workpiece into electrical engagement with the ring contact. The vessel may be adapted to contain an electroplating fluid between a top of the ring contact and the electrode. In one embodiment, a movable intermediate workpiece support assembly is carried by the vessel, the support assembly being actuatable to lower a workpiece carried thereby to deliver the workpiece to be supported accurately and precisely on the ring contact.
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