Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toru Ushirogouchi0
Naomi Shida0
Satoshi Saito0
Takeshi Okino0
Koji Asakawa0
Date of Patent
October 10, 2006
0Patent Application Number
109373130
Date Filed
September 10, 2004
0Patent Primary Examiner
Patent abstract
According to the present invention, a resist resin having in its structure a specific bridged-bond-containing aliphatic ring, and a resist composition comprising the same are provided. By using this resist composition, a resist pattern excellent in both transparency against short-wavelength light and dry-etching resistance can be formed by alkali development with high resolution.
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