Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas Albert Braymer0
Lisa Deis0
Martin Devenney0
Scott Jeffrey Weigel0
Brian Keith Peterson0
C. Eric Ramberg0
James Edward MacDougall0
John Francis Kirner0
...
Date of Patent
October 17, 2006
0Patent Application Number
106389420
Date Filed
May 20, 2003
0Patent Primary Examiner
Patent abstract
Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.
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