Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 17, 2006
Patent Application Number
10869558
Date Filed
June 16, 2004
Patent Primary Examiner
Patent abstract
A method for producing a library includes the steps of calculating a plurality of conditions for a reflection light from a periodic pattern by changing the sectional shape of the periodic pattern, a condition of an incident light which is emitted to the periodic pattern, an optical constant of a material which forms the periodic pattern, relating a plurality of the libraries to the plurality of the reflection light's conditions, and the optical constant corresponding to the plurality of the reflection light's conditions respectively.
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