Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kunihiko Yoshioka0
Takatoshi Nehagi0
Hirofumi Yamaguchi0
Date of Patent
October 24, 2006
0Patent Application Number
110891130
Date Filed
March 24, 2005
0Patent Primary Examiner
Patent abstract
A piezoelectric/electrostrictive film-type device is provided which includes a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode. The lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode are layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion.
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