Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 24, 2006
Patent Application Number
10839712
Date Filed
May 6, 2004
Patent Primary Examiner
Patent abstract
A lithographic projection apparatus includes a passive magnetic bearing configured to provide support between a first and second part of the lithographic apparatus and allow both parts to be displaced relative to each other in a direction perpendicular to the support direction. The passive magnetic bearing includes first and second magnetic assemblies. Each magnetic assembly includes at least one permanent magnet.
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