Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 24, 2006
Patent Application Number
10775044
Date Filed
February 9, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
Data are collected for deriving response models and information required for developing and maintaining processes and process tools. Methods and apparatus for collecting the data include a process tolerant sensor apparatus capable of collecting data with less perturbation and fewer disruptions than is usually possible using standard methods.
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