Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Weaver0
Ronald Schlagenhauser0
Date of Patent
October 31, 2006
0Patent Application Number
100970740
Date Filed
March 12, 2002
0Patent Primary Examiner
Patent abstract
A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.
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