Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Myung-song Jung0
Date of Patent
October 31, 2006
Patent Application Number
10862317
Date Filed
June 8, 2004
Patent Primary Examiner
Patent abstract
A microactuator using a shape memory alloy includes a substrate in which a space portion is formed, and a vibration plate which is installed on an upper surface of the substrate to cover the space portion, including a thin film formed of the shape memory alloy and at least one thin film on which a compressive residual stress acts. The vibration plate is initially transformed to bend to the space portion or to bend to be opposite to the space portion due to a bending moment caused by a compressive residual stress with respect to a first neutral axis, when the shape memory alloy is phase-transformed due to temperature rise.
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