Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akira Sugiyama0
Tatsushi Yamamoto0
Tsuneo Nakamura0
Date of Patent
October 31, 2006
0Patent Application Number
107991420
Date Filed
March 11, 2004
0Patent Primary Examiner
Patent abstract
While periphery or peripheries of workpiece(s) W lifted in floating fashion by simultaneous suction and expulsion of gas(es) between pair(s) of first and second, or upper and lower, transport stages 14, 15 is/are retained by plurality of elevator pins 16, respective transport stage(s) is/are inverted vertically and workpiece(s) is/are transferred from upper first transport stage(s) to lower second transport stage(s) such that workpiece(s) W is/are lifted in floating fashion thereabove by simultaneous suction and expulsion of gas(es) in accompaniment to lowering of respective elevator pin(s) at said first transport stage(s).
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