Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasunori Uetani0
Yoshiko Miya0
Kouji Toishi0
Date of Patent
October 31, 2006
0Patent Application Number
104046710
Date Filed
April 2, 2003
0Patent Primary Examiner
Patent abstract
The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator, and multifunctional epoxy compound, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.
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