US Patent 7129509 High-sensitivity optical scanning using memory integration
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Patent abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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US Patent 07129509 High-sensitivity optical scanning using memory integration US Patent 7129509 High-sensitivity optical scanning using memory integration
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Patent Number
0712950900
Patent Number
712950900
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Patent Jurisdiction
Patent Number
071295090
Date of Patent
October 31, 2006
0Patent Application Number
112250410
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
071295090
Date of Patent
October 31, 2006
0Patent Application Number
112250410
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
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US Patent 07129509 High-sensitivity optical scanning using memory integration
Infobox
Is a
Patent jurisdiction
Patent number
07129509
Date of patent
October 31, 2006
Patent application number
11225041
Date Filed
September 14, 2005
Patent primary examiner
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