Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jose I. Arno0
Date of Patent
October 31, 2006
0Patent Application Number
106684890
Date Filed
September 23, 2003
0Patent Primary Examiner
Patent abstract
The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. Specifically, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.
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