Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Terry Spooner0
Theordorus E. Standaert0
Glenn A. Biery0
Habib Hichri0
Jia Lee0
John A. Fitzsimmons0
Matthew S. Angyal0
Stephen E. Greco0
...
Date of Patent
November 14, 2006
0Patent Application Number
109018680
Date Filed
July 29, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An advanced back-end-of-line (BEOL) interconnect structure having a hybrid dielectric is disclosed. The inter-layer dielectric (ILD) for the via level is preferably different from the ILD for the line level. In a preferred embodiment, the via-level ILD is formed of a low-k SiCOH material, and the line-level ILD is formed of a low-k polymeric thermoset material.
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