Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bin-Ming Benjamin Tsai0
David Lee Brown0
J. Joseph Armstrong0
Yung-Ho Chuang0
Date of Patent
November 14, 2006
0Patent Application Number
100963180
Date Filed
March 12, 2002
0Patent Primary Examiner
Patent abstract
A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
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