Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gil Delgado0
James Wiley0
John McMurtry0
Date of Patent
November 21, 2006
Patent Application Number
10688839
Date Filed
October 16, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.
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