Patent attributes
Plural processing apparatuses 3 such as CVD apparatuses 31 and diffusion apparatuses 33, measuring apparatuses 5, and a control computer 7 for management are connected through a LAN 9. Each processing apparatuses 3 stores control data for performing a treatment. The control computer 7 also stores the control data for the processing apparatuses 3. The control computer 7 makes each processing apparatus perform a treatment for calibration. The control computer 7 receives a result of the treatment performed by the processing apparatus 3 to be calibrated, and calibrates the control data stored in the control computer 7 based on the treatment result. The control computer sends the calibrated control data to the processing apparatus 3 after completion of the calibration procedure. The processing apparatus 3 stores the calibrated control data, which is used for subsequently performed treatment.
