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US Patent 7141496 Method of treating microelectronic substrates

Patent 7141496 was granted and assigned to Micell Technologies on November, 2006 by the United States Patent and Trademark Office.

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Current Assignee
Micell Technologies
Micell Technologies
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
71414960
Patent Inventor Names
Stephen M. Gross0
James B. McClain0
James P. DeYoung0
Mark I. Wagner0
David Brainard0
Doug Taylor0
Date of Patent
November 28, 2006
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Patent Application Number
107629050
Date Filed
January 22, 2004
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Patent Primary Examiner
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Scott B. Geyer
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Patent abstract

A method of treating a dielectric surface portion of a semiconductor substrate, comprising the steps of: (a) providing a semiconductor substrate having a dielectric surface portion; and then (b) treating said dielectric surface portion with a coating reagent, the coating reagent comprising a reactive group coupled to a coordinating group, with the coordinating group having a metal bound thereto, so that the metal is deposited on the dielectric surface portion to produce a surface portion treated with a metal.

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