US Patent 7141765 Heat treating device
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Patent abstract
A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.
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US Patent 07141765 Heat treating device US Patent 7141765 Heat treating device
Infobox
Patent Number
0714176500
Patent Number
714176500
Edits on 24 Mar, 2023
Golden AI
Infobox
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Patent Jurisdiction
Patent Number
071417650
Date of Patent
November 28, 2006
0Patent Application Number
104732480
Date Filed
March 20, 2002
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071417650
Date of Patent
November 28, 2006
0Patent Application Number
104732480
Date Filed
March 20, 2002
0Official Website
Patent Primary Examiner
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US Patent 07141765 Heat treating device
Infobox
Is a
Patent jurisdiction
Patent number
07141765
Date of patent
November 28, 2006
Patent application number
10473248
Date Filed
March 20, 2002
Patent primary examiner
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