Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 5, 2006
0Patent Application Number
105106400
Date Filed
December 23, 2003
0Patent Primary Examiner
Patent abstract
A method for etching windows 40 in a semiconductor device 10 having a metal fuse 14 embedded therein is disclosed. The method is for allowing accurate fuse blowing, in particular laser fuse blowing. The method involves the controlled removal of layers having different phase diffraction characteristics. After treatment, the remaining area between the metal fuse 14 and the etched surface of the semiconductor has substantially uniform phase diffraction characteristics.
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