US Patent 7144806 ALD of tantalum using a hydride reducing agent
Patent 7144806 was granted and assigned to Novellus Systems on December, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 23, 2002
Date of Patent
December 5, 2006
Patent Application Number
10279147
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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