Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshinori Miwa0
Shinichi Hara0
Yasuo Hasegawa0
Yoshiki Kino0
Eiji Sakamoto0
Date of Patent
December 5, 2006
0Patent Application Number
112329870
Date Filed
September 23, 2005
0Patent Primary Examiner
Patent abstract
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.
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