US Patent 7146741 Measuring probe with diaphragms and modules

A measuring probe includes a suspension module 112 in which a stylus holder 140 is suspended from a housing on a pair of diaphragms 142,144. At least one of the diaphragms is formed with spiral cut-outs whereby the stylus, which is connected at the center of the diaphragms, is able to move transversely of the axis of the housing as the stylus holder pivots when transverse forces are applied to the stylus tip. A transducer module 110 is releasably supported on the suspension module by a kinematic mounting 116,118 and is retained in position by magnets 120. The transducer module contains optical transducers 200,210,220 for measuring the deflection of the stylus.