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US Patent 7151591 Alignment system, alignment method, and lithographic apparatus

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7151591
Date of Patent
December 19, 2006
Patent Application Number
10950668
Date Filed
September 28, 2004
Patent Citations Received
‌
US Patent 11673275 Through-beam auto teaching
0
Patent Primary Examiner
‌
D. Rutledge
Patent abstract

A system and a method for aligning two devices with respect to each other are presented. A first device is provided with a proximity switch and the second device is provided with a reference mark. When the second device enters a detection area of the proximity switch, a first state of the proximity switch changes to a second state, thus indicating a position of the second device with respect to the proximity switch. When the position of the second device is known with respect to the proximity switch, the devices may be positioned to a desired position with respect to each other. The proximity switch may be used to determine the position of the other device in a number of directions. Both the position and the orientation of the first device with respect to the second device may be determined using the proximity switch.

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