Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masato Taniguchi0
Yoshifumi Sugita0
Tsuyoshi Nakamura0
Nobuhito Saji0
Date of Patent
December 26, 2006
Patent Application Number
10761330
Date Filed
January 22, 2004
Patent Primary Examiner
Patent abstract
A positioning apparatus has a stage, guide elements provided on both ends of the stage, and drive elements which are provided at one of both ends of the stage and move the stage along the guide elements. Like linear guide rails 61A, 61B and linear guide bearings 23A, 23B, two guide elements are provided in an area where a ball screw shaft 52 serving as a drive element is placed. One guide element is provided in an area where a non-drive element is provided.
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