Patent attributes
A pressure transmitter has a housing (11) on which a pressure sensor (12) is fastened. There is provided in the housing a region, produced micromechanically, with reduced wall thickness that forms a separating diaphragm (22) such that the fluid located in a channel (16) does not act on the pressure sensor (12). The pressure sensor (12) is connected with a sensor diaphragm (24) directly to the separating diaphragm via a connecting layer (23), thereby rendering possible a highly space-saving design of the pressure transmitter. Consequently, the pressure transmitter can be formed, for example, by the pressure sensor and a channel structure, for example a microreactor, produced in a micromechanical design. A small dead volume in the channel structure is thereby produced in the region of the pressure transmitter.
