US Patent 7153443 Microelectromechanical structure and a method for making the same

Patent 7153443 was granted and assigned to Texas Instruments on December, 2006 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Texas Instruments

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7153443

Date of Patent

December 26, 2006

Patent Application Number

10805610

Date Filed

March 18, 2004

Patent Primary Examiner

‌

Nadine Norton

Patent abstract

A microstructure and the method for making the same are disclosed herein. The microstructure has structural members, at least one of which comprises an intermetallic compound. In making such a microstructure, a sacrificial material is employed. After completion of forming the structural layers, the sacrificial material is removed by a spontaneous vapor phase chemical etchant.

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