Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David A. Markle0
Somit Talwar0
Date of Patent
December 26, 2006
0Patent Application Number
107876640
Date Filed
February 26, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
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