Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 26, 2006
Patent Application Number
10466026
Date Filed
December 20, 2001
Patent Primary Examiner
Patent abstract
A sensor integrated on a semiconductor device (1), in particular a flow sensor, comprises a measuring element (2) on a membrane (5). In order to prevent a buckling of the membrane (5) a tensile coating (9) is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip (1) uncovered, such that their electrical properties are not affected.
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