US Patent 7154649 Device for deflecting optical beams

A device for deflecting optical beams is provided, the device having an array of mirror elements, and each mirror element being pivotable at any angle independently from another mirror element. This array may be manufactured micromechanically. The pivoting of the mirror element may be executed either capacitively or thermally. The array may be situated in a camera either as a deflecting mirror or as a lens. Scanning of a space element is also possible by using the array. Applications of the device include, e.g., use in a passive infrared detector, as well as use in a scattered-light smoke detector.