Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 2, 2007
Patent Application Number
11030858
Date Filed
January 7, 2005
Patent Primary Examiner
Patent abstract
A resonating pressure transducer operable to measure an applied pressure by measuring changes in a resonant frequency is disclosed. The pressure transducer comprises a plurality of diaphragms formed in a wafer of semi-conducting material between two layers, wherein each of the diaphragms is divided into a plurality of electrically isolated sections; a cavity in one of the covering layers opposite a corresponding one of the diaphragms, a first via formed through a selected one of the layers enables application of a potential to selected ones of the diaphragm sections; and a second via formed through a selected one of the layers enables transmission of a measure from selected ones of the diaphragm sections.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
