US Patent 7157660 Laser scanning apparatus and methods for thermal processing
Patent 7157660 was granted and assigned to Ultratech on January, 2007 by the United States Patent and Trademark Office.
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Patent abstract
Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
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US Patent 07157660 Laser scanning apparatus and methods for thermal processing US Patent 7157660 Laser scanning apparatus and methods for thermal processing
Infobox
Patent Number
0715766000
Patent Number
715766000
Edits on 29 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071576600
Date of Patent
January 2, 2007
0Patent Application Number
108060140
Date Filed
March 22, 2004
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071576600
Date of Patent
January 2, 2007
0Patent Application Number
108060140
Date Filed
March 22, 2004
0Official Website
Patent Primary Examiner
Edits on 8 Jun, 2022
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US Patent 07157660 Laser scanning apparatus and methods for thermal processing
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07157660
Date of patent
January 2, 2007
Patent application number
10806014
Date Filed
March 22, 2004
Patent primary examiner
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