US Patent 7157921 TFT array inspection apparatus

Patent 7157921 was granted and assigned to Shimadzu Corp. on January, 2007 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Shimadzu Corp.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7157921

Date of Patent

January 2, 2007

Patent Application Number

10825334

Date Filed

April 16, 2004

Patent Primary Examiner

‌

Minh N. Tang

Patent abstract

A TFT array inspection apparatus inspects a TFT array by irradiating an electron beam on a TFT substrate to obtain potential information. The TFT array inspection apparatus includes a scanning device for scanning the TFT substrate with an electron beam; a defect detecting device for detecting a defective site on the TFT substrate from a scanning signal of the TFT substrate; an irradiating device for irradiating the electron beam on the detected defective site; and a defect analyzing device. The defect analyzing device analyzes at least a type and/or an extent of the defect of the defective site based on a waveform change of a secondary electron signal detected through the electron beam irradiation and a driving state of the TFT.

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