US Patent 7158281 MEMs device with feedback control
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Patent Inventor Names
Hang Liao0
Sriram Ramamoorthi0
Timothy F. Myers0
Zhizhang Chen0
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Patent abstract
A MEMS device includes at least one movable member and an active device having at least one property affected by the location of the movable member with respect to the active device. A control circuit is used to limit movement of the movable member based on observation of the property affected by the active device.
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US Patent 07158281 MEMs device with feedback control US Patent 7158281 MEMs device with feedback control
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Patent Number
07158281
Patent Number
7158281
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US Patent 07158281 MEMs device with feedback control
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Is a
Patent jurisdiction
Patent number
07158281
Date of patent
January 2, 2007
Patent application number
11278761
Date Filed
April 5, 2006
Patent primary examiner
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