US Patent 7159421 Manufacture of planar waveguides using sol-gel techniques

Silica sol techniques are described for making thick silica or silica based films useful for planar optical waveguides. The process involves coating of a colloidal silica sol onto a substrate, drying the sol, and consolidating the dried sol to form the planar waveguide. Coating is performed in a simple operation, either by dipping, or preferably by spin coating. In a preferred embodiment the substrate is coated with a wetting agent prior to spin coating. It is found that the wetting agent substantially improves the thickness uniformity of the layer.