Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideshi Hamada0
Date of Patent
January 9, 2007
0Patent Application Number
103618230
Date Filed
February 11, 2003
0Patent Primary Examiner
Patent abstract
A method for preventing the deterioration of an electrode caused by the build up of deposits in openings of the electrode. Gas is supplied to each of the openings in order to prevent deposits from adhering to the openings before or after the etching treatment.
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