Patent attributes
A multilayered piezoelectric/electrostrictive device is provided, including a substrate, a plurality of piezoelectric/electrostrictive portions, and a plurality of electrodes. The piezoelectric/electrostrictive portions and the electrodes are alternately layered on the substrate, and the piezoelectric/electrostrictive portion positioned in the lowermost layer is anchored to the substrate directly or through an electrode. The ratio (α=A/B) of the average particle size (A) (μm) of the piezoelectric/electrostrictive ceramic of the piezoelectric/electrostrictive portion to the thickness (B) (μm) of the piezoelectric/electrostrictive portion satisfies the relationship expressed by “0.02≦α≦0.6” in each of the piezoelectric/electrostrictive portions.
