Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshio Nakamura0
Yoshio Otsuka0
Date of Patent
January 16, 2007
0Patent Application Number
108257440
Date Filed
April 16, 2004
0Patent Primary Examiner
Patent abstract
A method for adjusting temperature of a machining liquid, e.g., slurry, etching liquid, by passing the machining liquid through a heat exchanger. The heat exchanger, which adjusts the temperature of the machining liquid, includes a ceramic heat exchanging tube which is made by baking silicon carbide (SiC).
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