Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard W. Procter0
Eric G. Liniger0
Hazara Singh Rathore0
Hormazdyar Minocher Dalal0
Birendra N. Agarwala0
Brett H. Engel0
Chunyan E. Tian0
Diana Llera-Hurlburt0
...
Date of Patent
January 16, 2007
0Patent Application Number
106945000
Date Filed
October 27, 2003
0Patent Primary Examiner
Patent abstract
An edge seal around the periphery of an integrated circuit device which environmentally protects the copper circuitry from cracks that may form in the low-k interlevel dielectric during dicing. The edge seal essentially constitutes a dielectric wall between the copper circuitry and the low-k interlevel dielectric near the periphery of the integrated circuit device. The dielectric wall is of a different material than the low-k interlevel dielectric.
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