Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 16, 2007
Patent Application Number
10754157
Date Filed
January 9, 2004
Patent Primary Examiner
Patent abstract
A crystalline film includes a first crystalline region having a first film thickness and a first crystalline grain structure; and a second crystalline region having a second film thickness and a second crystalline grain structure. The first film thickness is greater than the second film thickness and the first and second film thicknesses are selected to provide a crystalline region having the degree and orientation of crystallization that is desired for a device component.
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