US Patent 7164465 Versatile maskless lithography system with multiple resolutions
Patent 7164465 was granted and assigned to Anvik Corporation on January, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 13, 2004
Date of Patent
January 16, 2007
Patent Application Number
10890498
Patent Jurisdiction
Patent Number
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